Airco Temescal Cv-8 Manual
Description Airco Temescal FC-1800 Evaporator Photos: Download OEM: Airco Temescal Model: Temescal FC-1800 Evaporator Description: Airco Temescal FC-1800 Evaporator System with Airco Temescal HV CNTL 14 (SN 175), Serial Number 210, To Include: Power Supply, Control Panel, CTI-Cryopump 8, Part Number 3543811G004, Serial Number Location:San Jose, CA, U.S.A. Please contact us for the availability of the following used semiconductor equipment and parts.
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Open the Roughing Valve by lifting the red toggle protector and metal lever up (Figure 38). Figure 38 – Pneumatic Roughing Valve (Open) 50. Pump the system down to 2E-2 torr (Figure 39 shown in blue). Figure 39 – Varian SenTorr 51.
Turn off power at main circuit breaker Figure 30 – Circuit Breaker (Off) 41. Close the HiVac valve (clockwise), it is important to make sure it is completely closed so apply approximately 50 pounds of force to the lever; you want it to be snug but not too tight.
Next, press the “Time” button and enter a value for “Time” (typically ‘9999’) and press “Enter” 5. Press the “Density” button and enter a value for “Density” (this depends on the metal you are depositing and should be obtained from the Bulk densities and Z Values table) and press “Enter” 6. Press the “Z Ratio” button and enter a value for “Z Ratio” (again, this depends on the metal you are depositing, obtain from the Bulk Densities and Z Values table) and press “Enter” 7. Finally, press the “Tooling” button and enter a value for “Tooling” (typically ‘100’), press “Enter” 24. Open the water valve (located behind Indy) by turning the valve to your left until the handle is parallel with the water line as shown in Figure 19. Figure 22 – CV-8 AircoTemescal 1.
Close the Bell Jar by pulling the lever backwards (indicated by the red arrow in Figure 36) Figure 36 – Bell Jar in the Closed Position 48. Next, close the Vent Valve by turning it clockwise (right), as seen in Figure 37 Figure 37 – Vent Valve (Close) 49. Open the Roughing Valve by lifting the red toggle protector and metal lever up (Figure 38). Figure 38 – Pneumatic Roughing Valve (Open) 50. Pump the system down to 2E-2 torr (Figure 39 shown in blue).
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Figure 31 – Hi-Vac Valve 42. Remove the front panel again by pulling downward on the rings and lifting up on the panel (Figure 32). Figure 32 – Front Panel Latches (marked by arrows) 43. Modular technologies inc. Open the “Vent Valve” by turning the knob counter clockwise (or to your left) until you hear a slight “hissing” sound, then turn it two or three more times as seen in Figure 33. Wait for the chamber to vent, the hissing will stop when it has reached Atmospheric pressure.
Place your wafer on the substrate mounting platter and secure it by fastening the metal clips as shown in Figure 7. Note: You need to use the 5/16th inch socket wrench to fasten the clips.
Airco Temescal Cv-8 Manual
ON” button (highlighted in orange) and hold for 1 second 4. Press the “Gun #1 Fil. On” button (highlighted in yellow) 5. Turn the “Emission Control” knob (in green) to desired setting which is dependent on the metal you are depositing 28. Look through the window in the bell jar, a light purple glow in the crucible in the chamber indicates the metal is heating up as seen in Figure 23. Figure 25 – Shutter Control (Open) 1. The shutter is controlled by a rubber tube located below the bell jar.
Turn off water valve (located behind Indy) by turning the valve to your right until the handle is perpendicular with the water line (Figure 29) Figure 29 – Water Valve (Off) 40. Turn off power at main circuit breaker Figure 30 – Circuit Breaker (Off) 41. Close the HiVac valve (clockwise), it is important to make sure it is completely closed so apply approximately 50 pounds of force to the lever; you want it to be snug but not too tight. Figure 31 – Hi-Vac Valve 42. Remove the front panel again by pulling downward on the rings and lifting up on the panel (Figure 32). Figure 32 – Front Panel Latches (marked by arrows) 43.